Method for arranging two substrates
AssigneeEV Group E. Thallner GmbH
InventorThomas Wagenleitner
Life of this patent
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Abstract
A method and device for the alignment of substrates that are to be bonded. The method includes detecting and storing positions of alignment mark pairs located on surfaces of the substrates. and aligning the substrates with respect to each other in accordance with the detected positions.
Claims10
A method for aligning a first substrate with a second substrate, the first substrate to be bonded with the second substrate, wherein the first substrate comprises a first substrate surface with a first substrate surface side and a second substrate surface side which lies opposite the first substrate surface side, wherein the second substrate comprises a second substrate surface to be bonded with the first substrate surface, wherein the second substrate surface comprises a third substrate surface side and a fourth substrate surface side which lies opposite the third substrate surface side, said method comprising:
- detecting and storing first positions of a first alignment mark pair on the first substrate surface of the first substrate, wherein a first alignment mark of the first alignment mark pair is arranged on the first substrate surface side and a second alignment mark of the first alignment mark pair is arranged on the second substrate surface side,
- detecting and storing second positions of a second alignment mark pair on the second substrate surface of the second substrate, wherein a third alignment mark of the second alignment mark pair is arranged on the third substrate surface side and a fourth alignment mark of the second alignment mark pair is arranged on the fourth substrate surface side,
- detecting and storing third positions of a third alignment mark pair on the second substrate surface of the second substrate, wherein a fifth alignment mark of the third alignment mark pair is arranged on the third substrate surface side and a sixth alignment mark of the third alignment mark pair is arranged on the fourth substrate surface side,
- detecting and storing fourth positions of a fourth alignment mark pair on the first substrate, wherein a seventh alignment mark of the fourth alignment mark pair is arranged on the first substrate surface side and an eighth alignment mark of the fourth alignment mark pair is arranged on the second substrate surface side,
- aligning the first and second substrates with respect to each other depending on the detected first positions, second positions, third positions, and fourth positions.
A device for the alignment of a first substrate with a second substrate, the first substrate to be bonded with the second substrate, said device comprising:
- first and second substrate holders for holding and fixing the first and second substrates,
- movement devices for moving the first and second substrate holders,
- lens systems for detecting positions of alignment marks on the first and second substrates,
- a storage device for storing the positions of the alignment marks.
A product with first and second substrates, said product comprising at least two alignment marks on each side of the first and second substrates.
Dependencies are inferred from the claim text.