Bandgap reference diode using thin film transistors
AssigneeIntel Corporation
InventorsAbhishek A. Sharma, Gilbert Dewey, Willy Rachmady, Van Le
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AssigneeIntel Corporation
InventorsAbhishek A. Sharma, Gilbert Dewey, Willy Rachmady, Van Le
Estimating the term…
Bandgap reference diodes and bandgap reference circuits are used to provide voltage references for a wide range of integrated circuit (IC) functions. Many bandgap reference diodes are fabricated directly on the substrate surface during the front-end-of-line (FEOL), and require a significant substrate footprint. Embodiments described herein are directed to bandgap reference diodes comprised of thin film transistors and methods of forming the same. The bandgap reference diodes described herein need not be fabricated during the FEOL, and can instead be formed during the back-end-of-line (BEOL) metallization workflow, freeing the substrate surface for other devices.
An interconnect structure for an integrated circuit, the interconnect structure comprising:
An integrated circuit (IC) device comprising:
A method for fabricating an interconnect structure for an integrated circuit, the method comprising:
Dependencies are inferred from the claim text.