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US 2019/0378776 A1Published application
Apparatus having a functional structure delimited by a frame structure and method for producing same
AssigneeInfineon Technologies AG
InventorsPrashanth Makaram, John Cooper, Joerg Ortner, Stephan Pindl, Caterina Travan, Alexander Zoepfl
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Abstract
An apparatus includes a semiconductor-based substrate with a functional structure that is formed in or on the semiconductor-based substrate. The apparatus includes a frame structure surrounding the functional structure and includes a coating that covers the functional structure and is delimited by the frame structure.
Claims22
An apparatus, comprising:
- a semiconductor-based substrate having a functional structure formed in or on the semiconductor-based substrate;
- a frame structure surrounding the functional structure;
- and
- a coating that covers the functional structure and is delimited by the frame structure.
1 more element
A method for producing a structure, the method comprising:
- providing a semiconductor-based substrate having a functional structure that is arranged in or on the semiconductor-based substrate;
- arranging a frame structure such that the frame structure surrounds the functional structure;
- and
- arranging a coating such that the coating covers the functional structure and is delimited by the frame structure.
1 more element
Dependencies are inferred from the claim text.