Teaching apparatus and teaching method for substrate transfer system

A teaching apparatus for a substrate transfer system, wherein

• the substrate transfer system includes a substrate transfer device and a substrate receiving device, the substrate transfer device is configured to hold a substrate, and the substrate receiving device is configured to receive the substrate from the substrate transfer device,
• the teaching apparatus comprises:
• a teaching substrate configured to be held to the substrate transfer device;
• a camera mountable to the teaching substrate;
• and
• a controller for controlling an operation of the substrate transfer device holding the teaching substrate and/or the substrate receiving device, and
• the controller includes:
• a receiving unit that receives an image photographed by the camera;
• an analyzer that calculates a relative positional relationship between the substrate transfer device and the substrate receiving device from the received image;
• and
• a determining unit that determines a stop position of the substrate transfer device and/or the substrate receiving device based on the relative positional relationship between the substrate transfer device and the substrate receiving device calculated by the analyzer.