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US 2019/0378732 A1Published application
Treatment apparatus for treating workpiece
AssigneeDisco Corporation
InventorSatoshi HANAJIMA
Life of this patent
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Abstract
A treatment apparatus including a chuck table, a table base, a servo motor that rotates the table base, and a determination unit that determines the kind of the chuck table mounted to the table base is provided. The determination unit includes a torque recording section in which a torque outputted by the servo motor when rotating the table base is recorded on the basis of the kind of the chuck table, and a determination section that collates the torque outputted by the servo motor with the torque recording section, to thereby determine the kind of the chuck table.
Claims3
A treatment apparatus comprising:
- a chuck table that has a holding surface mounting a workpiece thereon and holds the workpiece;
- a table base to which the chuck table is detachably fixed;
- a servo motor that rotates the table base around a rotational axis along a direction perpendicular to the holding surface of the chuck table mounted to the table base;
- a treatment unit that treats the workpiece held by the chuck table;
- and
- a determination unit that determines the kind of the chuck table mounted to the table base,
- wherein the determination unit includes
- a torque recording section in which a torque outputted by the servo motor when rotating the table base is recorded on a basis of the kind of the chuck table mounted to the table base,
- a determination section that measures a torque outputted by the servo motor when rotating the table base with the chuck table mounted thereto, and collates the measured torque with each of the torques recorded in the torque recording section, to thereby determine the kind of the chuck table, and
- a reporting section that reports a result of determination carried out by the determination section.
7 more elements
Dependencies are inferred from the claim text.