Method for transferring a pattern from an organic mask

A method for patterning a stack having a patterned organic mask with a plurality of mask features including sidewalls and tops, a hardmask and an etch layer, wherein the patterned organic mask is positioned over the hardmask which is positioned over the etch layer, comprising:

• depositing an atomic layer deposition, wherein the depositing the atomic layer deposition trims the plurality of mask features of the patterned organic mask, wherein the depositing the atomic layer deposition comprises:
• a first plurality of cycles for depositing a first thickness of the atomic layer deposition, wherein each of the first plurality of cycles comprises:
• flowing a first precursor to deposit a first layer of precursor over the patterned organic mask;
• and
• curing the first layer of precursor over the patterned organic mask to form a first layer as part of the atomic layer deposition, wherein the curing the first layer of precursor comprises:
• providing a first radio frequency (RF) power along with an oxygen gas to perform a plasma flash process for a first period of time;
• and
• a second plurality of cycles for depositing a second thickness of the atomic layer deposition, wherein each of the second plurality of cycles comprises:
• flowing a second precursor to deposit a second layer of precursor over the patterned organic mask;
• and
• curing the second layer of precursor over the patterned organic mask to form a second layer as part of the atomic layer deposition, wherein the curing the second layer of precursor comprises providing a second RF power along with the oxygen gas to perform the plasma flash process for a second period of time, wherein either the second RF power is greater than the first RF power or the second period of time is greater than the first period of time or both;
• breaking through the atomic layer deposition;
• and
• selectively etching the hardmask with respect to the patterned organic mask, wherein the atomic layer deposition reduces faceting of the plurality of mask features of the patterned organic mask during the selective etching.