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AssigneeHitachi High-Technologies Corporation
InventorsShinichi MURAKAMI, Wen LI, Hiroyuki TAKAHASHI, Masazumi TONE
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In a charged particle beam control device, irradiation accuracy of an electron beam can be prevented from deteriorating due to a variation in a ground potential. A current control circuit (1) includes a current conversion unit (4) that supplies a constant current (Id) by adjusting an amount of a current flowing through a current detection resistor (R1) based on a control signal (V1), a differential amplification unit (5) to which a voltage of a first ground side terminal (G1) of the control signal and a voltage of a second ground side terminal (G2) of the current detection resistor (R1) are input, and that outputs an output signal (V3) proportional to a voltage difference between the voltage of the first ground side terminal (G1) and the voltage of the second ground side terminal (G2), and a correction unit (6) to which the output signal (V3) output from the differential amplification unit (5) and the control signal (V1) are input, and that adds the output signal (V3) to the control signal (V1) at a predetermined ratio.
A charged particle beam control device that converts reflected electrons generated by irradiating a sample with a charged particle beam into an electrical signal and processes the electrical signal, the charged particle beam control device comprising:
A charged particle beam control device that converts reflected electrons generated by irradiating a sample with a charged particle beam into an electrical signal and processes the electrical signal, the charged particle beam control device comprising:
A charged particle beam control device that converts reflected electrons generated by irradiating a sample with a charged particle beam into an electrical signal and processes the electrical signal, the charged particle beam control device comprising:
Dependencies are inferred from the claim text.