Deflector for multiple electron beams and multiple beam image acquiring apparatus

A multiple beam image acquiring apparatus comprising:

• a primary optical system configured to irradiate multiple primary electron beams onto a substrate;
• a beam separator configured to separate, from the multiple primary electron beams, multiple secondary electron beams including reflected electrons, emitted from the substrate due to that the substrate is irradiated with the multiple primary electron beams;
• a detector configured to detect the multiple secondary electron beams having been separated;
• and
• a deflector for multiple electron beams configured to deflect the multiple secondary electron beams having been separated to a range which can be detected by the detector,
• wherein the deflector for multiple electron beams includes
• a first electrode substrate,
• second to fourth electrode substrates disposed in order in parallel to each other in a first same plane which is orthogonal to a substrate surface of the first electrode substrate,
• a fifth electrode substrate disposed opposite to the first electrode substrate, and
• sixth to eighth electrode substrates disposed in order in parallel to each other in a second same plane such that they are opposite to the second to fourth electrode substrates,
• wherein the first, second, third, fourth, fifth, sixth, seventh, and eighth electrode substrates are disposed such that they surround a space through which the multiple secondary electron beams pass.