Coordinates-based variational autoencoder for generating synthetic via layout patterns

A non-transitory computer-readable storage medium comprising a computer-readable program for generating a plurality of physical design layout patterns, wherein the computer-readable program when executed on a computer causes the computer to perform the steps of:

• selecting one or more physical design layouts for neural network training;
• converting the plurality of physical design layout patterns into coordinate arrays, a coordinate array of the coordinate arrays including via center coordinates of vias in a physical design layout pattern of the plurality of physical design layout patterns;
• training, by employing the coordinate arrays, a variational autoencoder (VAE);
• and
• generating one or more new synthetic coordinate arrays by employing the trained VAE, a synthetic coordinate array of the one or more new synthetic coordinate arrays including via center coordinates of vias for a new physical design layout pattern.

A system configured to train a machine learning based model, the system comprising:

• one or more computer subsystems;
• and
• one or more components executed by the one or more computer subsystems, wherein the one or more components include the machine learning based model configured for generating a plurality of physical design layout patterns by:
• selecting one or more physical design layouts for neural network training;
• converting the plurality of physical design layout patterns into coordinate arrays, a coordinate array of the coordinate arrays including via center coordinates of vias in a physical design layout pattern of the plurality of physical design layout patterns;
• training, by employing the coordinate arrays, a variational autoencoder (VAE);
• and
• generating one or more new synthetic coordinate arrays by employing the trained VAE, a synthetic coordinate array of the one or more new synthetic coordinate arrays including via center coordinates of vias for a new physical design layout pattern.