Molding apparatus for molding composition on substrate with mold, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorAtsushi Kimura
Life of this patent
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Abstract
A molding apparatus that molds a composition on a substrate with a mold includes a mold holding unit configured to hold the mold, a substrate holding unit configured to hold the substrate, a first elastic member configured to apply a first elastic force to the mold holding unit in a direction away from the substrate holding unit, and a control unit configured to cause the mold holding unit to move in the direction away from the substrate holding unit in a case where the control unit determines that an abnormality has occurred.
Claims16
A molding apparatus that molds a composition on a substrate with a mold, the molding apparatus comprising:
- a mold holding unit configured to hold the mold;
- a substrate holding unit configured to hold the substrate;
- a first elastic member configured to apply a first elastic force to the mold holding unit in a direction away from the substrate holding unit;
- and
- a control unit configured to cause the mold holding unit to move in the direction away from the substrate holding unit in a case where the control unit determines that an abnormality has occurred.
A molding apparatus that molds a composition on a substrate with a mold, the molding apparatus comprising:
- a mold holding unit configured to hold the mold;
- a substrate holding unit configured to hold the substrate;
- an elastic member configured to apply an elastic force to the substrate holding unit in a direction away from the mold holding unit;
- and
- a control unit configured to cause the substrate holding unit to move in the direction away from the mold holding unit in a case where the control unit determines that an abnormality has occurred.
An article manufacturing method comprising:
- forming a composition on a substrate with use of a molding apparatus configured to mold the composition on the substrate with a mold;
- processing the substrate on which the composition is formed;
- and
- manufacturing an article using the processed substrate,
- wherein the molding apparatus comprises:
- a mold holding unit configured to hold the mold;
- a substrate holding unit configured to hold the substrate;
- a first elastic member configured to apply a first elastic force to the mold holding unit in a direction away from the substrate holding unit;
- and
- a control unit configured to cause the mold holding unit to move in the direction away from the substrate holding unit in a case where the control unit determines that an abnormality has occurred.
Dependencies are inferred from the claim text.