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US 2019/0377153 A1Published application
Optical structure with ridges arranged at the same and method for producing the same
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsFrank WIPPERMANN, Andreas REIMANN, Nicolas LANGE, Andreas BRAEUER
Life of this patent
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Abstract
An apparatus having an optical structure, ridges and an electrostatic actuator with a cantilever electrode is described, wherein the ridges connect the optical structure to a supporting structure and the electrostatic drive is implemented to deflect the optical structure.
Claims37
1-43. (canceled)
Apparatus comprising:
- an optical structure;
- at least two ridges, each connecting the optical structure to a supporting structure;
- and
- an electrostatic drive for deflecting the optical structure,
- wherein the electrostatic drive comprises a cantilever electrode and a stationary electrode electrically insulated from the cantilever electrode, which at least partly opposes the cantilever electrode,
- wherein the cantilever electrode is arranged on or in at least one portion of at least one ridge and wherein the cantilever electrode is at least partly deflected out of a plane where the ridge is arranged in the direction of the stationary electrode, in order to effect deformation of the ridge when an electric field is applied between the cantilever electrode and stationary electrode.
3 more elements
Method for producing an apparatus comprising an optical structure with at least two ridges, each connecting the optical structure to a supporting structure, and an electrostatic drive, the method comprising:
- forming the ridges in order to allow a movement of the optical structure in relation to a reference plane;
- arranging a cantilever electrode on or in a portion of the ridges;
- arranging the stationary electrode such that the same opposes the cantilever electrode at least partly and is electrically insulated from the cantilever electrode;
- deflecting the cantilever electrode in the direction of the stationary electrode, wherein applying an electric field between the cantilever electrode and the stationary electrode causes a deformation of the ridge and a movement of the optical structure.
1 more element
Dependencies are inferred from the claim text.