Probe card device and three-dimensional signal transfer structure thereof

A probe card device, comprising:

• a three-dimensional (3D) signal transfer structure including:
• a transfer plate having a first surface and a second surface that is opposite to the first surface, wherein the transfer plate includes a plurality of signal circuits each having a signal contact arranged on the first surface;
• a supporting frame abutted against and fixed onto the first surface of the transfer plate, wherein a portion of the first surface abutted against the supporting frame is arranged outside the signal contacts;
• and
• a guiding plate having a plurality of thru-holes and disposed on the supporting frame, wherein the guiding plate, the supporting frame, and the transfer plate jointly and surroundingly define a receiving space, and the signal contacts of the transfer plate are arranged in the receiving space;
• and
• a plurality of conductive probes each having an elastic segment, a detecting segment, and a connecting segment, the latter two of which are respectively arranged at two opposite sides of the elastic segment, wherein the conductive probes respectively pass though the thru-holes of the guiding plate, the elastic segment and the connecting segment of each of the conductive probes are arranged in the receiving space, and the detecting segment of each of the conductive probes is exposed out of the receiving space, and wherein the connecting segments of the conductive probes are respectively fixed on the signal contacts of the transfer plate.