US 2019/0376938 A1 · Vacuum Ultraviolet Absorption Spectroscopy System And Method

Abstract

In one embodiment, an improved gas analysis system having a gas flow cell is provided. In another embodiment an improved gas flow cell is provided. As disclosed herein, dead volumes in a gas flow channel of a gas flow cell may be minimized through the use of one or more additional gas inlets. In one embodiment, an additional gas inlet is located between an analyte gas inlet and a light entrance optical coupling of the gas flow cell. In another embodiment, an additional gas inlet is located between an analyte gas outlet and a light exit optical coupling of the gas flow cell. In addition, enclosed regions may be formed adjacent seals of the gas flow channel of the gas flow cell. The enclosed regions may be evacuated and/or purged so as to minimize the passage of contaminants through the seals into the gas flow channel.

Claims20

Dependent claims

A gas analysis system configured to analyze an analyte gas, the gas analysis system comprising:

a gas flow cell, the gas flow cell optically coupled to an optical detection system and a light source, the gas analysis system configured to provide collimated light to the gas flow cell, the gas flow cell comprising:
a gas inlet;
a gas outlet;
a gas flow channel, the gas flow channel being environmentally sealed to provide a controlled environment for a flow of the analyte gas from the gas inlet to the gas outlet;
at least one make-up gas inlet, the make-up gas inlet configured to provide a make-up gas flow of a make-up gas to sweep at least one dead-volume region, the make-up gas being different from the analyte gas;
and
a plurality of optical couplings through which VUV wavelengths or less of light may pass as part of transmission of the light through the gas flow channel.

4 more elements

A gas flow cell, the gas flow cell comprising:

a gas inlet;
a gas outlet;
a gas flow channel, the gas flow cell being environmentally sealed to provide a controlled environment for a flow of a first gas from the gas inlet to the gas outlet through the gas flow channel;
at least a first make-up gas inlet, the first make-up gas inlet configured to provide a first make-up gas flow of a make-up gas to sweep at least a first dead-volume region, the make-up gas being different from the first gas;
a plurality of optical couplings through which VUV wavelengths or less of light may pass as part of transmission of the light through the gas flow channel;
a first enclosed region external to the gas flow channel;
at least a first seal, the first seal being between the gas flow channel and the first enclosed region;
and
at least a first secondary gas inlet and at least a first secondary gas outlet, the first secondary gas inlet and the first secondary gas outlet allowing for a first secondary gas to enter and exit the enclosed region to control the environment within the enclosed region in order to decrease the diffusion of contaminants through the first seal into the gas flow channel.

6 more elements

Dependencies are inferred from the claim text.

Vacuum Ultraviolet Absorption Spectroscopy System And Method

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Vacuum Ultraviolet Absorption Spectroscopy System And Method

Life of this patent

Abstract

Claims20