Ultrasonic device and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsHironori SUZUKI, Chikara KOJIMA
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Abstract
An ultrasonic device has a substrate in which ultrasonic elements transmitting an ultrasonic wave in a first direction are arrayed. A reverberation reduction film which reduces reverberant vibration of the substrate is arranged on a side of the first direction in the ultrasonic element. In the reverberation reduction film, a groove is arranged between the ultrasonic elements next to each other.
Claims6
An ultrasonic device comprising a substrate in which ultrasonic elements transmitting an ultrasonic wave in a first direction are arrayed, wherein
- a reverberation reduction film which reduces reverberant vibration of the substrate is arranged on a side of the first direction in the ultrasonic element, and
- in the reverberation reduction film, a groove is arranged between the ultrasonic elements next to each other.
An ultrasonic device comprising a substrate in which ultrasonic elements receiving an ultrasonic wave traveling from a first direction are arrayed, wherein
- a reverberation reduction film which reduces reverberant vibration of the substrate is arranged on a side of the first direction in the ultrasonic element, and
- in the reverberation reduction film, a groove is arranged between the ultrasonic elements next to each other.
Dependencies are inferred from the claim text.