Method and device for adjusting quality determination conditions for test body

A non-transitory computer-readable recording medium recording a program to be executed in a computer, wherein the program includes executable instructions that instruct a processing unit, when executed by the processing unit, to perform:

• acquiring measurement values for structures of a plurality of inspection objects from a database;
• determining whether each of the plurality of inspection objects is good or defective by comparing error values of the measurement values with respect to design values of the structures with a predetermined reference value;
• identifying one or more inspection objects in which a determination error has occurred, among the plurality of inspection objects, the determination error comprising a first error in which an inspection object determined to be good is identified to be defective and a second error in which an inspection object determined to be defective is identified to be good;
• generating an inspection result graph comprising the number of the plurality of inspection objects according to the error values, the reference value, and the number of the one or more inspection objects in which the determination error has occurred and outputting the inspection result graph through an output unit;
• updating the reference value according to a graphical input on the inspection result graph through the user input unit such that the number of the one or more inspection objects in which the determination error has occurred is reduced;
• and
• redetermining whether each of the plurality of inspection objects is good or defective by comparing the error values with the updated reference value.

A device for adjusting a condition for determining a quality of an inspection object, the device comprising:

• a database configured to store design values and measurement values for structures of a plurality of inspection objects;
• a quality determination unit configured to determine whether each of the plurality of inspection objects is good or defective by comparing error values of the measurement values with respect to design values of the structures with a predetermined reference value;
• a determination result generation unit configured to identify one or more inspection objects in which a determination error has occurred, among the plurality of inspection objects, and configured to output an inspection result graph comprising the number of the plurality of inspection objects according to the error values, the reference value, and the number of the one or more inspection objects in which the determination error occurred, the determination error comprising a first error in which an inspection object determined to be good is identified to be defective and a second error in which an inspection object determined to be defective is identified to be good;
• and
• a determination reference adjustment unit configured to update the reference value according to a graphical input on the inspection result graph through the user input unit such that the number of the one or more inspection objects in which the determination error has occurred is reduced,
• wherein the quality determination unit is configured to redetermine whether each of the plurality of inspection objects is good or defective by comparing the error values with the updated reference value.