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US 2019/0376899 A1Published application
Methods and apparatus for a biosensor
AssigneeSemiconductor Components Industries, LLC
InventorsSwarnal BORTHAKUR, Ulrich BOETTIGER
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Abstract
Various embodiments of the present technology may comprise a method and apparatus for a biosensor. The biosensor comprises a vertical flow channel that extends through a photodiode, and wherein the photodiode is lateral to the channel's vertical sidewall.
Claims20
A sensing device, comprising:
- a sensor chip having a first horizontal surface and an opposing second horizontal surface, and comprising:
- an array of pixels extending from the first horizontal surface to the second horizontal surface, wherein each pixel comprises at least one photodiode;
- and
- a plurality of detection regions arranged vertically in the pixel array, wherein each detection region:
- is defined by a substantially perpendicular sidewall extending between the first and second horizontal surfaces;
- and
- comprises an opening at the first horizontal surface;
- wherein a first photodiode from the array of pixels is positioned lateral to at least a portion of the sidewall of a first detection region from the plurality of detection regions.
5 more elements
A method for detecting fluorescence in a fluid containing a biological material, comprising:
- flowing the fluid through a channel arranged vertically in a pixel, wherein:
- the pixel comprises a photodiode,
- the channel comprises a substantially vertical sidewall, and
- the photodiode is disposed laterally adjacent to at least a portion of the sidewall.
1 more element
A sensing device adapted for detecting fluorescent radiation in a biological fluid, comprising:
- a sensor chip, comprising:
- an array of pixels, wherein each pixel comprises:
- a photodiode comprising:
- a vertical thru-hole centrally located in the photodiode and defined by a vertical sidewall;
- a passivation layer disposed on the photodiode;
- and
- a metal layer disposed on the passivation layer and forming a first horizontal surface of the sensor chip;
- and
- a carrier chip bonded to an opposing second horizontal surface of the sensor chip, and comprising a collection area configured to receive the biological fluid from the thru-hole.
6 more elements
Dependencies are inferred from the claim text.