Film chamber having double film
AssigneeInficon GmbH
InventorDaniel Wetzig
Life of this patent
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Abstract
The invention relates to a film chamber 10 which has a film chamber wall for testing the sealing tightness of a gas-filled test specimen 38, which film chamber wall defines a chamber volume 32 for holding the test specimen 38 and has a first vacuum connection 28 for evacuating the chamber volume 32 by means of a first vacuum pump 30 connected to the first vacuum connection 28, wherein at least a portion of the film chamber wall has a flexible film 12, 14, characterized in that the film 12, 14 has two layers 20, 22 arranged adjacent to each other which surround an evacuable film interspace 26.
Claims7
A film chamber comprising a film chamber wall provided for a tightness test on a gas-filled test specimen, said film chamber wall defining a chamber volume for accommodating said test specimen and being provided with a first vacuum connection for evacuating said chamber volume by means of a first vacuum pump connected to said first vacuum connection, wherein at least a portion of the film chamber wall comprises a flexible film and wherein said film comprises two layers arranged adjacent to each other and surrounding an evacuable film interspace,
- characterized in that
- a second vacuum connection is provided to which a second vacuum pump is connected for evacuating the film interspace.
Dependencies are inferred from the claim text.