Micromechanical pressure sensor

Abstract

A micromechanical pressure sensor, having —a pressure sensor core including a sensor diaphragm and a cavity developed above the sensor diaphragm; and —a pressure sensor frame; and —a spring element for the mechanical connection of the pressure sensor core to the pressure sensor frame being developed in such a way that a mechanical robustness is maximized and a coupling of stress from the pressure sensor frame into the sensor pressure core is minimized.

Dependencies are inferred from the claim text.