Sensor element and thermal flow sensor for determining a physical variable of a measurment medium
AssigneeInnovative Sensor Technology IST AG
InventorsFlorian Krogmann, Patrik Grob, Barb Yannick
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AssigneeInnovative Sensor Technology IST AG
InventorsFlorian Krogmann, Patrik Grob, Barb Yannick
Estimating the term…
The present disclosure resides in a sensor element for determining a physical, measured variable of a measured medium, comprising: a planar substrate; a functional layer applied on a surface of the substrate; a passivating layer applied on the functional layer; a metal connecting layer applied on the surface of the passivating layer such that the passivating layer is completely covered; and a metal platelet applied on the surface of the metal connecting layer such that no contact can occur between the passivating layer and the measured medium, as well as residing in a thermal flow sensor, which has at least two such sensor elements.
1-15. (canceled)
A sensor element for determining a physical, measured variable of a measured medium, the sensor element comprising:
A thermal flow sensor, comprising:
Dependencies are inferred from the claim text.