Treatment device, plating apparatus including the same, conveying device, and treatment method

A treatment method comprising:

• a step of conveying a workpiece in a state where a flat surface of the workpiece is inclined around a conveying directional axis relative to a horizontal plane;
• and
• a treatment step of performing at least one of polishing, cleaning and drying on the flat surface of the workpiece, wherein
• the step of conveyance includes
• a step of physically applying force in a conveying direction to an end part of the workpiece,
• a step of holding the flat surface of the workpiece with a first Bernoulli chuck so as to limit movement of the workpiece in a thickness direction, and
• a step of holding an end face of an opposite end part to the end part of the workpiece with a second Bernoulli chuck so as to limit movement of the workpiece in an in-plane direction perpendicular to the conveying direction.

A conveying device which conveys a workpiece in a state where a flat surface of the workpiece is inclined around a conveying directional axis relative to a horizontal plane, the device comprising:

• a drive part configured to be brought into physical contact with an end part of the workpiece and apply force in a conveying direction to the workpiece;
• a first Bernoulli chuck arranged to face the flat surface of the workpiece;
• and
• a second Bernoulli chuck arranged to face an end face of an opposite end part to the end part of the workpiece.