Enhanced anodization for processing equipment

A method of manufacturing a chamber component for a processing chamber, the method comprising:

• providing a metallic article, wherein the metallic article is a part of the chamber component;
• anodizing the metallic article by forming an anodization layer on the metallic article, wherein the anodization layer comprises a barrier layer adjacent to an external surface of the metallic article and a porous layer on top of the barrier layer, the porous layer comprising columns of anodization layer material with pores between adjacent columns;
• and
• sealing the porous layer by forming a sealing layer at a top of the porous layer, wherein the sealing layer is formed by conformally coating the columns in the porous layer with one or more layers of a coating material.

A chamber component for a processing chamber, comprising:

• a metallic article that is a part of the chamber component;
• an anodization layer formed on the metallic article, wherein the anodization layer comprises a barrier layer adjacent to an external surface of the metallic article and a porous layer on top of the barrier layer, the porous layer comprising columns of anodization layer material with pores between adjacent columns;
• and
• a hybrid sealing layer formed at a top of the porous layer, wherein the hybrid sealing layer comprises, in any order, two or more of the following layers:
• a hydrated metallic oxide layer;
• a plated nickel layer;
• and
• a polytetrafluoroethylene (PTFE) layer.

A chamber component for a processing chamber, comprising:

• a metallic article that is a part of the chamber component;
• an anodization layer formed on the metallic article, wherein the anodization layer comprises a barrier layer adjacent to an external surface of the metallic article and a porous layer on top of the barrier layer, the porous layer comprising columns of anodization layer material with pores between adjacent columns;
• and
• a sealing layer formed at a top of the porous layer, wherein the sealing layer comprises one or more layers of a coating material conformally deposited onto the columns in the porous layer.