Vacuum coating apparatus
AssigneeSatisloh AG
InventorsFranco Moreni, Antonio Corea, Giuseppe Viscomi
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AssigneeSatisloh AG
InventorsFranco Moreni, Antonio Corea, Giuseppe Viscomi
Estimating the term…
A box coating apparatus for vacuum coating of substrates has a vacuum chamber containing an evaporation source and a substrate holder formed as a dome related to the evaporation source and rotatable about an axis. A masking arrangement is located in between for partially shadowing the substrates on the substrate holder relative to the evaporation source. The masking arrangement comprises a fixed masking portion stationary in the vacuum chamber, and a plurality of gradient sector portions carrying gradient shields assigned to the substrates on the substrate holder, for forming a gradient mask. The gradient sector portions can be rotated about the axis between a gradient mask open position where they are stored behind the fixed masking portion, and a gradient mask closed position where they are spread like a fan between the evaporation source and the substrate holder.
A box coating apparatus for vacuum coating of substrates, in particular spectacle lens blanks, comprising a vacuum chamber which contains an evaporation source and a substrate holder for holding a plurality of substrates, said substrate holder being formed as a dome disposed relative to said evaporation source and rotatable by a dome rotary drive about an axis of rotation that passes through said evaporation source, so that substrates held by said substrate holder can be moved on circular paths about said axis of rotation with a respective constant spacing relative to said evaporation source, wherein a masking arrangement is located in said vacuum chamber between said evaporation source and said substrate holder for partially shadowing the substrates held by said substrate holder relative to said evaporation source, characterized in that said masking arrangement comprises a fixed masking portion that is stationary in said vacuum chamber, and a plurality of gradient sector portions each carrying gradient shields assigned to the substrates held by said substrate holder, for forming a gradient mask, wherein said gradient sector portions can be rotated about said axis of rotation between a gradient mask open position in which said gradient sector portions are stored behind said fixed masking portion, and a gradient mask closed position in which said gradient sector portions are spread like a fan between said evaporation source and said substrate holder.
Dependencies are inferred from the claim text.