Back to results
US 2019/0375630 A1Published application
MEMS Device
AssigneeTDK Corporation
InventorsKlaus Mayer, Christian Siegel, Anton Leidl, Wolfgang Pahl, Stefan Stufler
Life of this patent
Estimating the term…
Abstract
A MEMS device is disclosed. In an embodiment a MEMS device includes a substrate having an active region and at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier, wherein the connection element comprises a stress-reducing structure.
Claims16
A MEMS device comprising:
- a substrate comprising an active region;
- and
- at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier,
- wherein the connection element comprises a stress-reducing structure.
1 more element
Dependencies are inferred from the claim text.