System for transferring substrate
AssigneeSamsung Display Co., Ltd.
InventorsYoungsoo KO, Seungkyu PARK
Life of this patent
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Abstract
A system for transferring a substrate may adjust a suction force to a suitable level. The system may include a work table, a picker, and a pressure measuring unit. The work table may include a work area for supporting the substrate. The picker may be disposed above the work table and may include a suction unit for providing the suction force. The pressure measuring unit may overlap the suction unit and may include a pressure-sensitive element for facilitating adjustment of the suction force.
Claims20
A system for transferring a substrate, the system comprising:
- a work table comprising a work area for supporting the substrate;
- a picker comprising a suction unit;
- and
- a pressure measuring unit comprising a pressure sensor and positioned between the picker and a portion of the work table in a direction perpendicular to the work area.
A system for transferring a substrate, the system comprising:
- a work table comprising a work area for supporting the substrate;
- and
- a picker disposed above the work table and comprising a suction unit,
- wherein the suction unit comprises:
- a nozzle portion disposed at an end of the suction unit;
- and
- a pressure measuring unit disposed at the nozzle portion and comprising pressure sensors.
Dependencies are inferred from the claim text.