Resonant network for plasma power supply and power supply device for plasma generator
AssigneesNew Power Plasma Co., Ltd., Research & Business Foundation Sungkyunkwan University
InventorsSeung Hee RYU, Chang Seob LIM, Hong Kweon MOON, Won Yong SUNG, Geun Wan KOO, Byoung Kuk LEE
Life of this patent
Estimating the term…