Device for inspecting mask plate, method for inspecting mask plate, and corresponding method for controlling light sources

Abstract

The embodiments of the present disclosure propose a device for inspecting a mask plate, a method for inspecting a mask plate, and a corresponding method for controlling light sources. The device includes: an image sensor configured to capture an image of the mask plate; and a plurality of light sources disposed on one side of the mask plate opposite to the image sensor, wherein at least one of the plurality of light sources is configure to emit light when the image sensor is capturing an image of a first region of the mask plate, and the at least one light source comprises light sources within a first range, wherein the first range corresponds to the first region and an orthographic projection of the image sensor on a light source plane falls within the first range. The method for controlling light sources includes: turning on at least one of a plurality of light sources disposed on one side of the mask plate opposite to an image sensor, which corresponds to a first region of the mask plate to be inspected, when the image sensor is moved to a position corresponding to the first region.

Dependencies are inferred from the claim text.