Acoustic wave device, radio-frequency front end circuit, and communication device
AssigneeMurata Manufacturing Co., Ltd.
InventorMasakazu MIMURA
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AssigneeMurata Manufacturing Co., Ltd.
InventorMasakazu MIMURA
Estimating the term…
An acoustic wave device utilizes Love waves and includes a piezoelectric substrate (piezoelectric body), an IDT electrode provided on the piezoelectric substrate, and a first dielectric film that is provided on the piezoelectric substrate and covers the IDT electrode. A center region, first and second edge regions, and first and second gap regions are disposed in this order in the IDT electrode. A mass-adding film is provided inside the first dielectric film in the first edge region and the second edge region. When T1 is the film thickness of the portion of the first dielectric film located between the IDT electrode and the mass-adding film and T2 is the film thickness of the portion of the first dielectric film located between the mass-adding film and the surface of the first dielectric film on the opposite side from the piezoelectric substrate, T1/(T1+T2)<about 0.5.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.