Electrostatic chuck filter box and mounting bracket

A method of electrically coupling an electrostatic chuck RF filter box with a pedestal lift, the method comprising:

• providing the electrostatic chuck RF filter box, wherein the RF filter box comprises:
• at least one contact block including a plurality of self-aligning electrical connectors on an outer mating surface of the RF filter block;
• and
• at least one alignment feature on the outer mating surface of the RF filter box, wherein the at least one alignment feature is configured for aligning the self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift
• automatically mate when the contact block is mounted to the bracket of the pedestal lift;
• positioning the outer mating surface of the RF filter box against a mating surface of a mounting bracket of the pedestal lift by using the at least one alignment feature to engage a corresponding alignment feature on the mounting bracket of the pedestal lift;
• and
• securing the RF filter box to the mounting bracket of the pedestal lift to electrically couple the RF filter box with the pedestal lift, wherein the plurality of electrical connectors on the RF filter box and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the RF filter box is secured to the mounting bracket of the pedestal lift.