Solenoid structure with conductive pillar technology

A method of fabricating a three-dimensional solenoid structure comprising:

• fabricating a first inductor portion including a first surface and a second surface opposite the first surface;
• fabricating a first capacitor portion;
• fabricating a first inductor pillar coupled to the first surface of the first inductor portion;
• fabricating at least one capacitor pillar coupled to the first capacitor portion;
• fabricating a second inductor portion including a first surface and a second surface opposite the first surface;
• fabricating a second inductor pillar coupled to the first surface of the second inductor portion;
• and
• fabricating a first inductor bonding interface between the first inductor pillar and the second inductor pillar to couple the first inductor portion and the second inductor portion.

A three-dimensional solenoid structure, comprising:

• a first inductor portion including a first surface and a second surface opposite the first surface;
• a first capacitor portion;
• a first inductor pillar coupled to the first surface of the first inductor portion;
• at least one capacitor pillar coupled to the first capacitor portion;
• a second inductor portion including a first surface and a second surface opposite the first surface;
• a second inductor pillar coupled to the first surface of the second inductor portion;
• and
• means for bonding the first inductor pillar and the second inductor pillar to couple the first inductor portion and the second inductor portion.