Negative electrode of thin film battery and method for makingthesame and a thin film using the negative electrode

A method for forming a negative electrode of a thin film battery, comprising steps of:

• providing a metal substrate;
• forming a metal layer on the metal substrate, wherein the metal layer is titanium metal or vanadium metal;
• transforming the metal layer into a porous structural layer having a three-dimensional porous frame formed by titanium oxide or vanadium oxide;
• depositing a material selected from a group consisting Ag, Al, Bi, C, Ge, Sb, Si, Sn and Zn, on the three-dimensional porous frame to form a capacitor layer;
• and
• forming a lithium ion source layer on the capacitor layer, wherein a material for forming the lithium ion source layer is lithium source.

A thin film battery, comprising:

• a positive electrode;
• and
• a negative electrode, coupled to the positive electrode, the negative electrode comprising:
• a first metal substrate;
• a porous structural layer, formed on the first metal substrate, wherein the porous structural layer has a three-dimensional porous frame formed by titanium oxide or vanadium oxide;
• a capacitor layer, formed on the porous structural layer, wherein a material for forming the capacitor layer is selected from a group consisting Ag, Al, Bi, C, Ge, Sb, Si, Sn and Zn, and the material is deposited on the three-dimensional porous frame for forming the capacitor layer;
• and
• a lithium ion source layer, formed on the capacitor layer, wherein a material for forming the lithium ion source layer is lithium source.