Film for preventing humidity from percolation and method for manufacturing the same

An organic light emitting device comprising:

• a substrate;
• a light emitting part on the substrate;
• and
• a moisture prevention film on the light emitting part,
• wherein in the moisture prevention film, a concentration of oxygen (O) included in the moisture prevention film from a lower portion to an upper portion of the moisture prevention film increases gradually and then decreases, and a concentration of nitrogen (N) decreases gradually and then increases.

A method of manufacturing a moisture prevention film, the method comprising:

• a first moisture prevention film forming process of forming a first moisture prevention film through a chemical vapor deposition process;
• a second moisture prevention film forming process of forming a second moisture prevention film on the first moisture prevention film through an atomic layer deposition process;
• and
• a third moisture prevention film forming process of forming a third moisture prevention film on the second moisture prevention film through a chemical vapor deposition process.

A method of manufacturing a moisture prevention film, the method comprises;

• a first process of forming a film through a reaction of a source gas including silicon with a first reactant gas including ammonia (NH3) and nitrogen (N2);
• a second process of forming a film through a reaction of a source gas including silicon (Si) with a second reactant gas including nitrous oxide (N2O);
• and
• a third process of forming a film through a reaction of the source gas including silicon with the first reactant gas including ammonia (NH3) and nitrogen (N2).