Vapor deposition method, and el device manufacturing method

An EL device manufacturing method comprising:

• a lifting step for mounting a substrate on a vapor deposition mask fixed on a mask frame and lifting the mask frame to bring the substrate into contact with a touch plate disposed above the mask frame;
• a measurement step for measuring a thickness of the mask frame;
• a lifting amount determination step for determining a lifting amount of the mask frame on the basis of the thickness of the mask frame measured by the measurement step;
• and
• a vapor deposition step for vapor-depositing a vapor deposition layer for an EL device onto the substrate through the vapor deposition mask fixed to the mask frame lifted by the lifting step.

A vapor deposition method comprising:

• a fixing step for fixing a vapor deposition mask on a mask frame;
• and
• a lifting step for lifting the mask frame to bring the vapor deposition mask into contact with a substrate disposed above the mask frame,
• wherein the mask frame is formed into a frame shape surrounding an opening,
• the vapor deposition mask includes a plurality of divided sheets, each having a strip shape and extending across the opening,
• the mask frame includes a recessed portion formed between the plurality of divided sheets, and
• the lifting step includes a gap measurement step for measuring a gap between the substrate and a bottom face of the recessed portion of the mask frame while lifting the mask frame, and
• a lifting speed reduction step for reducing a lifting speed of the mask frame when the gap measured by the gap measurement step reaches a predetermined threshold value.