Configurable resistor

A configurable impedance element, comprising:

• a first impedance network comprising a plurality of series impedance elements;
• a trim impedance network parallel to the first impedance network, comprising a plurality of corresponding impedance elements to the impedance elements of the first impedance network;
• and
• antifuses between the impedance elements of the first impedance network and their corresponding impedance elements of the trim impedance network.

An integrated circuit, comprising:

• a digital logic circuit comprising a plurality of transistors;
• and
• an impedance element comprising:
• a first impedance network comprising a plurality of series impedance elements;
• a trim impedance network parallel to the first impedance network, comprising a plurality of corresponding impedance elements to the impedance elements of the first impedance network;
• and
• antifuses between the impedance elements of the first impedance network and their corresponding impedance elements of the trim impedance network.

A method of manufacturing an integrated circuit, comprising:

• depositing a first thin film resistive layer;
• patterning the first thin film resistive layer;
• depositing an antifuse layer, comprising thin film patterning of a dielectric material having antifuse properties;
• depositing an inter-layer dielectric layer;
• depositing a second thin film resistive layer;
• and
• patterning the second thin film resistive layer;
• wherein the first thin film resistive layer and second film resistive layer form a resistive element, comprising:
• a first impedance network comprising a plurality of series impedance elements, a trim impedance network parallel to the first impedance network, comprising a plurality of corresponding impedance elements to the impedance elements of the first impedance network, and antifuses between the impedance elements of the first impedance network and their corresponding impedance elements of the trim impedance network.