Semiconductor structure and method for manufacturing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPU-FANG CHEN, SHI-CHIEH LIN, VICTOR Y. LU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPU-FANG CHEN, SHI-CHIEH LIN, VICTOR Y. LU
Estimating the term…
A method of manufacturing a semiconductor structure includes the following operations. A wafer with an orientation mark at a first crystal orientation represented by a family of Miller indices comprising <ijk> is provided, wherein i2+j2+k2=2. A first chip and a second chip are connected to a first surface of the wafer. A first edge of the first chip and a second edge of the second chip are adjacent to each other. A boundary extending in a direction between the first edge and the second edge is formed. The direction is not parallel to the first crystal orientation.
1-9. (canceled)
A semiconductor structure, comprising:
18-20. (canceled)
A semiconductor structure, comprising:
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.