Thermally isolated electronics utilities cavity for a substrate carrier

A substrate carrier comprising

• a plurality of electrostatic chuck panels;
• a carrier body comprising:
• a first body member having the electrostatic chuck panels disposed thereon;
• a second body member separated from the first body member by thermal breaks;
• an electronics utilities cavity disposed within the second body member;
• a battery disposed within the electronics cavity and configured to provide a first power supply signal to control electronics;
• and
• a thermal insulating material disposed on at least one wall of the electronics utilities cavity.

A carrier body for a substrate carrier having a plurality of electrostatic chuck panels, the carrier body comprising:

• a first body member configured to have the electrostatic chuck panels disposed thereon;
• a second body member separated from the first body member by thermal breaks;
• an electronics utilities cavity disposed within the second body member;
• control electronics disposed within the electronics utilities cavity;
• a high voltage power supply disposed within the electronics utilities cavity, and configured to supply a second power supply signal;
• a battery disposed within the electronics cavity, and configured to provide a first power supply signal to the control electronics and the high voltage power supply, the first power supply signal is a lower voltage than the second power supply signal;
• and
• a thermal insulating material disposed on at least one wall of the electronics utilities cavity.