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US 2019/0355606 A1Published application
Electrostatic substrate holder
AssigneeEV Group E. Thallner GmbH
InventorChristoph Flotgen
Life of this patent
Estimating the term…
Abstract
An electrostatic substrate holder for accommodating and holding a substrate, a method for processing a substrate, and a processing plant. The electrostatic substrate holder includes a stator having electrodes that generate an electrostatic holding force for fixing the substrate.
Claims22
1-17. (canceled)
An electrostatic substrate holder for accommodating and holding a substrate, said electrostatic substrate holder comprising:
- a rotor having a holder for fixing the substrate on a holding surface,
- a stator for accommodating and bearing the rotor,
- electrodes for generating an electrostatic holding force for fixing the substrate,
- wherein the stator has the electrodes, whereby the electrodes are separated from the holding surface, and
- wherein the rotor is mounted by means of electrically conductive bearing elements, the electrically conductive bearing elements contacting the electrodes of the stator.
2 more elements
Dependencies are inferred from the claim text.