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US 2019/0355598 A1Published application
Processing apparatus, member, and temperature control method
AssigneeTokyo Electron Limited
InventorEitaro KATAOKA
Life of this patent
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Abstract
A processing apparatus includes a processing container in which a processing space is formed, a member that is disposed in the processing container, and a flow path formed inside the member, wherein the flow path is provided in a plurality of stages with respect to a surface of the member on a side of the processing space.
Claims15
A processing apparatus comprising:
- a processing container 10 in which a processing space is formed;
- a member that is disposed in the processing container;
- and
- a flow path formed inside the member,
- wherein the flow path is provided in a plurality of stages with respect to a surface of the member on a side of the processing space.
2 more elements
A member disposed toward a processing space of
- a processing container,
- the member comprising:
- a flow path that is formed in the member, the flow path being provided in a stages with respect to a surface of the member on aside of the processing space.
A temperature control method for controlling a processing apparatus including
- a processing container, in which a processing space is formed,
- a member disposed in the processing container,
- a flow path formed inside the member, the flow path being provided in a plurality of stages with respect to the surface of the member on side of the processing space, and
- an O-ring in contact with a surface of the member opposite the surface of the processing space, the temperature control method comprising:
- a first step, in which a temperature controlled medium having a first temperature is caused to flow in from a first flow path on a side close to the surface of the member on the side of the processing space and to flow out from a second flow path on a side far from the surface of the member on the side of the processing space;
- and
- a second step, in which the temperature controlled medium having a second temperature different from the first temperature is caused to flow in from the first flow path and to flow out from the second flow path.
4 more elements
Dependencies are inferred from the claim text.