US 2019/0341244 A1 · MULTI-CELL EXCIMER LAMP

Abstract

An excimer lamp includes a plurality of sheets and a plurality of spacers arranged to form a stack of a plurality of cells in comprising a plurality of chambers. The plurality of sheets includes a first outer sheet, a second outer sheet and a plurality of interior sheets. Each sheet in the plurality of sheets has an outer edge and comprises a material that is transmissive to a target wavelength. Each spacer is placed between two sheets and near the outer edge of each sheet. Each chamber is defined by a volume at least partially enclosed by the two sheets and at least one spacer. An emission material is within each chamber. A first electrode is coupled to the first outer sheet, exterior to the stack, and a second electrode is coupled to the second outer sheet, exterior to the stack. A method of manufacturing the excimer lamp is also disclosed.

Claims13

Dependent claims

An excimer lamp comprising:

a plurality of sheets comprising a first outer sheet, a second outer sheet and a plurality of interior sheets, wherein each sheet in the plurality of sheets has an outer edge and comprises a material that is transmissive to a target wavelength;
a plurality of spacers, each spacer being placed between two sheets in the plurality of sheets and near the outer edge of each sheet, wherein the plurality of sheets and the plurality of spacers are arranged to form a stack of a plurality of cells including a plurality of chambers, each chamber being a volume at least partially enclosed by the two sheets and at least one spacer in the plurality of spacers;
an emission material within each chamber in the plurality of chambers;
a first electrode coupled to the first outer sheet, exterior to the stack;
and
a second electrode coupled to the second outer sheet, exterior to the stack.

3 more elements

Dependencies are inferred from the claim text.

Multi-cell excimer lamp

Life of this patent

Multi-cell excimer lamp

Life of this patent

Abstract

Claims13