Assembly and method for inspecting components
AssigneeIsmeca Semiconductor Holding SA
InventorsJerome PARATTE, Pierrick ABRIAL, Thierry EME
Life of this patent
Estimating the term…
Loading patent…
AssigneeIsmeca Semiconductor Holding SA
InventorsJerome PARATTE, Pierrick ABRIAL, Thierry EME
Estimating the term…
According to the present invention there is provided a method of inspecting a component (10), using an assembly comprising a camera (3) with a fixed position, and a moveable stage (5), wherein the moveable stage is configured such that it can rotate about a rotation axis (7), and, can move linearly along two linear axes (9a, 9b) wherein said two linear axes are perpendicular to one another and wherein both of said two linear axes are each perpendicular to the rotation axis, the method comprising the steps of, (a) providing a first component into a predefined orientation on the stage, such that a first side of the component is facing a camera; (b) moving the stage linearly along one or more of said two linear axes so as to bring the first side of the first component into focus of the camera; (c) capturing an image of the first side of the first component after it has been brought into focus of the camera. An assembly according to the above comprising additionally a processor which is configured to determine whether the image of the component is in-focus of the camera, and if not, to determine a movement of the moveable stage and to initiate the moveable stage to undergo said determined movement so as to bring the component into focus is also provided.
A method of inspecting a component, using an assembly comprising a camera with a fixed position, and a moveable stage, wherein the moveable stage is configured such that it can rotate about a rotation axis, and, can move linearly along two linear axes wherein said two linear axes are perpendicular to one another and wherein both of said two linear axes are each perpendicular to the rotation axis, the method comprising the steps of, providing a first component into a predefined orientation on the stage, such that a first side of the component is facing a camera;
Dependencies are inferred from the claim text.