Sample Height Measurement Using Digital Grating
AssigneeZhongke Jingyuan Electron Limited
InventorsShiguang Li, Jie Guo
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Abstract
A method, an apparatus, and a non-transitory computer-readable medium for measuring a height of a sample includes: receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.
Claims20
A method for measuring a height of a sample, comprising:
- receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample;
- determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image;
- and
- determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.
An apparatus for measuring a height of a sample, comprising:
- an optical sensor having pixels;
- a processor;
- and
- a memory coupled to the processor, the memory configured to store instructions which when executed by the processor become operational with the processor to:
- receive, by the optical sensor, an optical grating image of an illuminated optical grating reflected by a surface of the sample;
- determine a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image;
- and
- determine the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.
A non-transitory computer-readable medium, comprising instructions for measuring a height of a sample which when executed by a processor become operational with the processor to:
- receive, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample;
- determine a first digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image, and a second digital grating image by resetting the values of the first pixels and keeping the values of the second pixels;
- and
- determine the height based on a relationship between the height and integrated intensities at portions of the first and second digital grating images.
Dependencies are inferred from the claim text.