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US 2019/0319604 A1Published application
Piezoelectric thin film and bulk acoustic wave filter
AssigneeSnapTrack, Inc.
InventorsYukari Inoue, Tomohiro Terada, Junichi Kimura
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Abstract
A piezoelectric thin film comprises aluminum nitride containing a monad and at least one type among a tetrad and a pentad. The piezoelectric thin film having a large electromechanical coupling factor and a small stiffness.
Claims10
A piezoelectric thin film comprising aluminum nitride containing a monad and at least one type from among a tetrad and a pentad.
A bulk acoustic wave filter comprising:
- a substrate;
- a piezoelectric thin film disposed on the substrate, the piezoelectric thin film including aluminum nitride containing a monad and at least one type from among a tetrad and a pentad;
- and
- a pair of electrodes,
- wherein the piezoelectric thin film is disposed between the pair of electrodes.
2 more elements
Dependencies are inferred from the claim text.