Three-dimensional memory device containing bidirectional taper staircases and methods of making the same
AssigneeSanDisk Technologies LLC
InventorsYasushi Ishii, Jun Akaiwa, Kiyokazu Shishido, Hiroyuki Ogawa
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AssigneeSanDisk Technologies LLC
InventorsYasushi Ishii, Jun Akaiwa, Kiyokazu Shishido, Hiroyuki Ogawa
Estimating the term…
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory stack structures vertically extending through the alternating stack, each memory stack structure including a memory film and a vertical semiconductor channel, and a contact well set that includes contact wells extending through a respective upper region of the alternating stack. Each of the contact wells contains first stepped surfaces which have a stepwise descending vertical profile along a first horizontal direction and second stepped surfaces which have a stepwise descending vertical profile along a second horizontal direction which is perpendicular to the first horizontal direction.
A three-dimensional memory device, comprising:
(canceled)
The three-dimensional memory device of claim 22, wherein the contact well set has a vertical cross-sectional profile along a vertical plane that is parallel to the first horizontal direction, and wherein the vertical cross-sectional profile that includes a stepwise descending vertical cross-sectional profile as a function of a distance from the third peripheral sidewall toward the fourth peripheral sidewall along the first horizontal direction, followed by a vertical step at one of the third vertical surface and the fourth vertical surface, and then followed by a stepwise ascending vertical cross-sectional profile as a function of the distance from the third peripheral sidewall toward the fourth peripheral sidewall along the first horizontal direction.
(canceled)
The three-dimensional memory device of claim 21, further comprising bit lines which extend in the second horizontal direction.
-20. (canceled)
Dependencies are inferred from the claim text.