Esd protection element
AssigneeMurata Manufacturing Co., Ltd.
InventorNoriyuki UEKI
Life of this patent
Estimating the term…
Abstract
An ESD protection element includes a semiconductor substrate, a wiring layer, and an inductor conductor. The semiconductor substrate includes a Zener diode. The inductor conductor is provided on the wiring layer and has a two-dimensional spiral shape. The inductor conductor includes a first inductor conductor and a second inductor conductor that are continuously provided from an outer peripheral end toward an inner peripheral end, and a connection conductor portion in a vicinity of a portion at which the first inductor conductor and the second inductor conductor are connected to each other. The second inductor conductor has a width smaller than a width of the first inductor conductor.
Claims20
An ESD protection element comprising:
- a substrate including a semiconductor region having a surge absorbing element;
- a wiring layer disposed on the substrate;
- an inductor conductor disposed in the wiring layer and having a spiral shape including an outer peripheral end and an inner peripheral end;
- and
- first, second and third external connection terminals disposed in or on the wiring layer;
- wherein the inductor conductor includes:
- a first inductor conductor disposed on an outer peripheral side that includes the outer peripheral end;
- a second inductor conductor disposed on an inner peripheral side that includes the inner peripheral end;
- and
- a connection conductor that connects the first inductor conductor to the second inductor conductor;
- wherein the outer peripheral end of the inductor conductor is connected to the first external connection terminal;
- wherein the inner peripheral end of the inductor conductor is connected to the second external connection terminal;
- wherein the connection conductor of the inductor conductor is connected to the third external connection terminal by the surge absorbing element;
- and
- wherein the second inductor conductor has a width in a plan view of the wiring layer that is smaller than a width of the first inductor conductor.
An ESD protection element comprising:
- a substrate including a semiconductor region having a surge absorbing element;
- a wiring layer disposed on the substrate;
- first, second and third external connection terminals disposed in or on the wiring layer;
- and
- an inductor conductor disposed in the wiring layer and having a spiral shape, wherein the inductor conductor includes:
- a first inductor conductor disposed on an outer peripheral side of the inductor conductor and connected to the first external connection terminal;
- a second inductor conductor disposed on an inner peripheral side of the inductor conductor and connected to the second external connection terminal;
- a connection conductor between the first and second inductor conductors and connected to the third external connection terminal via the surge absorbing element,
- wherein the second inductor conductor has a width that is smaller than a width of the first inductor conductor.
An ESD protection element comprising:
- a substrate including a semiconductor region having a surge absorbing element;
- a wiring layer disposed on the substrate;
- and
- an inductor conductor disposed in the wiring layer and having a spiral shape including an outer peripheral end and an inner peripheral end, the inductor conductor including:
- a first inductor conductor disposed on an outer peripheral side that includes the outer peripheral end;
- a second inductor conductor disposed on an inner peripheral side that includes the inner peripheral end;
- and
- a connection conductor that connects the first inductor conductor to the second inductor conductor;
- wherein the second inductor conductor has a width in a plan view of the wiring layer that is smaller than a width of the first inductor conductor.
Dependencies are inferred from the claim text.