Semiconductor devices and methods for manufacturing the same
AssigneeWinbond Electronics Corp.
InventorMing-Chung CHIANG
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AssigneeWinbond Electronics Corp.
InventorMing-Chung CHIANG
Estimating the term…
A method for manufacturing a semiconductor device is provided. The method includes providing a substrate having a first region and a second region. The method also includes forming an interconnection structure on the first region and a fuse structure on the second region. The method further includes forming a first conductive pad on the interconnection structure. In addition, the method includes forming a capping layer, an etching stop layer and a dielectric layer to cover the first conductive pad and the fuse structure. The method further includes performing an etching process so that a first opening is formed to expose the conductive pad and a second opening is formed directly above the fuse structure. During the etching process, the first dielectric layer has a first etching rate, and the etching stop layer has a second etching rate that is lower than the first etching rate.
A method for manufacturing a semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.