Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorCarsten DEUS
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Abstract
According to various embodiments, a method for vaporizing a vaporization material by means of an electron beam may include the following: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.
Claims20
An electron beam vaporizer for vaporizing a vaporization material, the electron beam vaporizer comprising:
- an electron beam source for generating an electron beam;
- a deflection device for deflecting the electron beam;
- a ring crucible having a passage opening;
- a rod, which is arranged at least in portions in the passage opening and comprises the vaporization material, wherein an outer edge of the rod adjoins an inner edge of the ring crucible;
- and
- a control device for controlling the deflection of the electron beam by means of the deflection device, wherein the control device is configured in such a way that a first deflection pattern and a second deflection pattern are generated by means of the electron beam, wherein the first deflection pattern has a lower power density than the second deflection pattern, wherein the first deflection pattern is generated at least on the rod and wherein the second deflection pattern is generated on a portion of the outer edge of the rod and on a portion of the inner edge of the ring crucible.
A method for vaporizing a vaporization material by means of an electron beam, wherein the vaporization material is arranged in the form of a rod in a passage opening of a ring crucible, wherein an outer edge of the rod adjoins an inner edge of the ring crucible, the method comprising:
- alternately generating a first deflection pattern and a second deflection pattern by means of deflection of the electron beam, wherein the first deflection pattern has a lower power density than the second deflection pattern, wherein the first deflection pattern is generated at least on the rod, and wherein the second deflection pattern is generated on a portion of the outer edge of the rod and on a portion of the inner edge of the ring crucible.
A method for vaporizing a vaporization material by means of an electron beam, the method comprising:
- generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material;
- and, subsequently,
- generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.
Dependencies are inferred from the claim text.