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US 2019/0318860 A1Published application
Iron-aluminum alloy magnetic thin film
AssigneesThe Board of Trustees of The University of Alabama, TDK Corporation
InventorsTakao SUZUKI, Tim MEWES, Gary J. MANKEY, Isao KANADA, Yusuke ARIAKE
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Abstract
An Fe—Al alloy magnetic thin film according to the present invention contains, in terms of atomic ratio, 0% to 35% (inclusive of 0%) of Co and 1.5% to 2% of Al. A direction of a crystal contained in a material is perpendicular to a substrate surface and a crystallite size is 150 Å or less. Methods of making and using said thin film are also disclosed.
Claims25
An Fe—Al alloy magnetic thin film, comprising:
- in terms of atomic ratio, 0% to 35% of Co;
- and 1.5% to 2% of Al, wherein a <110> direction of a crystal contained in a material is perpendicular to a substrate surface and a crystallite size is 150 Å or less.
(canceled)
(canceled)
A method of preparing an Fe—Al alloy magnetic thin film, comprising:
- depositing a target material comprising one or more of Fe, Co, and Al onto a substrate by sputtering,
- wherein the Fe—Al alloy magnetic thin film comprises, in terms of atomic ratio, 0% to 35% of Co;
- and 1.5% to 2% of Al, wherein a <110> direction of a crystal contained in a material is perpendicular to the substrate surface and with a crystallite size is 150 Å or less.
Dependencies are inferred from the claim text.