Electron channeling pattern acquisition from small crystalline areas

A method for crystal analysis, comprising:

• stepping through a plurality of positions for the crystalline region by adjusting a location where a sample is located while a scanning electron microscope (SEM) image is to be taken;
• acquiring a whole image for each of the plurality of different positions of the crystalline region using the SEM;
• processing the whole images to stitch together a composite map of the crystalline region at different locations;
• and
• displaying a full electronic channeling pattern on a display.

A crystal analysis system, comprising:

• a scanning electron microscope (SEM) configured to:
• step through a plurality of positions for the crystalline region by adjusting a location where a sample is located, and
• acquire a whole image for each of the plurality of different positions of the crystalline region using the SEM;
• a processing unit configured to process the whole images to stitch together a composite map of the crystalline region at different locations;
• and
• a display device configured to display a full electronic channeling pattern.