Model for estimating stochastic variation
AssigneeASML Netherlands B.V.
InventorSteven George HANSEN
Life of this patent
Estimating the term…
Abstract
A method including: obtaining a resist process dose sensitivity value for a patterning process; applying the resist process dose sensitivity value to a stochastic model providing values of a stochastic variable as a function of resist process dose sensitivity to obtain a value of the stochastic variable; and designing or modifying a parameter of the patterning process based on the stochastic variable value.
Claims20
A method comprising:
- obtaining a resist process dose sensitivity value for a patterning process;
- applying, by a hardware computer, the resist process dose sensitivity value to a stochastic model providing values of a stochastic variable as a function of resist process dose sensitivity to obtain a value of the stochastic variable;
- and
- designing or modifying a parameter of the patterning process based on the stochastic variable value.
A method comprising:
- obtaining resist quencher parameter values for a patterning process;
- obtaining measured values of a stochastic variable of the patterning process;
- and
- calibrating, by a hardware computer, a model predicting a value of the stochastic variable, based on the resist quencher parameter values and the measured values of the stochastic variable.
A computer program product comprising a non-transitory computer-readable medium having instructions therein, the instructions, upon execution by a computer system, configured to cause the computer system to at least:
- obtain a resist process dose sensitivity value for a patterning process;
- apply the resist process dose sensitivity value to a stochastic model providing values of a stochastic variable as a function of resist process dose sensitivity to obtain a value of the stochastic variable;
- and
- design or modify a parameter of the patterning process based on the stochastic variable value.
Dependencies are inferred from the claim text.