X-ray sensing device and manufacturing method thereof

An X-ray sensing device, comprising:

• a substrate;
• a first material layer disposed over the substrate;
• a circuit element disposed at a bottom portion of the first material layer;
• a columnar structure disposed over the circuit element and contacting the circuit element, wherein the columnar structure comprises a scintillator material;
• and
• a pad disposed on a top surface or a bottom surface of the first material layer and coupled to the circuit element.

A method for manufacturing an X-ray sensing device, comprising:

• providing a carrier substrate;
• forming a first material layer over the substrate, wherein a circuit element is disposed at a bottom portion of the first material layer, and wherein a photoelectric sensing element is disposed over the circuit element;
• patterning the first material layer to form an opening that exposes a portion of the surface of the photoelectric sensing element;
• and
• filling a scintillator material in the opening to form a columnar structure, wherein the columnar structure is in contact with the photoelectric sensing element.