Systems and devices for molecule sensing and method of manufacturing thereof
AssigneeArizona Board of Regents, acting for and on behalf of Arizona State University
InventorsBrett GYARFAS, Stuart LINDSAY, Pei PANG
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Abstract
Embodiments of the disclosure are directed to a device for molecule sensing. In some embodiments, the device includes a first electrode separated from a second electrode by a dielectric layer. The first electrode comprises a large area electrode and the second electrode comprises a small area electrode. At least one opening (e.g., trench) cut or otherwise created into the dielectric layer exposes a tunnel junction therebetween whereby target molecules in solution can bind across the tunnel junction.
Claims22
A method for manufacturing a device for detecting one or more target molecules comprising:
- depositing a first bottom electrode onto a solid supporting layer wherein the first electrode including a first area;
- depositing a dielectric layer over the first electrode;
- depositing a second top electrode over the dielectric layer, wherein the second electrode includes a second area which is substantially less than the first area;
- and
- cutting or etching at least one trench through at least the second electrode and the dielectric layer, such that the bottom of the trench exposes the first electrode and exposes a tunnel junction between the electrodes.
(canceled)
A method for manufacturing a device for identifying one or more target molecules comprising:
- depositing a first bottom electrode onto a solid supporting layer, wherein the first electrode including a first area;
- depositing a dielectric layer over the first electrode;
- depositing a second top electrode over the dielectric layer, wherein the second electrode includes a second area which is substantially less than the first area;
- and
- establishing at least one trench through at least the second electrode and the dielectric layer, such that the bottom of the trench exposes a tunnel junction between the first and second electrodes;
- substantially covering the device with a first passivating layer;
- and
- establishing an opening in the passivating layer adjacent the at least one trench.
21-38. (canceled)
A method for identifying one or more target molecules comprising:
- providing a device comprising a first bottom electrode having a first thickness, the first electrode deposited onto a solid supporting layer,
- a dielectric layer substantially covering the first electrode;
- a second top electrode having a second thickness, the second electrode being separated from the first electrode by the dielectric layer, wherein the surface area of the second electrode is less than the surface area of the first electrode;
- and
- at least one trench cut or etched through at least the second electrode and dielectric layer such that at least the bottom of the opening exposes the first electrode, the trench configured to expose a tunnel junction between the electrodes to facilitate communication of one or more target molecules with the first and second electrodes;
- functionalizing at least a portion of at least one of the electrodes with first molecules, the first molecules configured for forming non-covalent bonds with one or more target molecules;
- flowing a solution containing one or more target molecules past the electrodes;
- and
- detecting the one or more target molecules upon the one or more target molecules forming a non-covalent bond with the first molecules.
Dependencies are inferred from the claim text.